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Graphene Nanomanufacturing

Most graphene-based NEMS devices are fabricated in a “one-off” manner using slow, limited scale methods such as mechanical exfoliation, electron beam lithography, or transfer from copper foils which can’t be incorporated into standard micro- and nanofabrication lines. In order to overcome this limitation, a method was developed that can be used to manufacture graphene-based NEMS devices at the wafer scale using conventional microfabrication techniques. In this project graphene is grown directly on thin film copper using chemical vapor deposition. The copper film is then patterned and etched to produce graphene-based NEMS resonators. This research is still in the early stages of development but this manufacturing method offers the potential to increase the throughput, yield, and repeatability of manufacturing graphene resonators while reducing the manufacturing cost and complexity.